Yusupova Dilfuza Aminovna
Jurnal: Horizon: Journal of Humanity and Artificial Intelligence
ISSN: 2835-3064
Volume: 2, Issue: 5
Tanggal Terbit: 01 May 2023
The work is devoted to the study of electrophysical and tensometric properties of polycrystalline film sensitive elements based on bismuth-antimony tellurides. The paper considers the influence of the deposition rate on the resistivity and strain-sensitivity coefficient of bismuth-antimony telluride films grown on a polyimide substrate. These dependences show that with an increase in the deposition rate from 10 nm/s to 40 nm/s, the resistivity of the films decreases, and the value of the strain sensitivity coefficient passes through a maximum at 20 nm/s, the amplitude of which is determined by the evaporation temperature.